Aura® Series
|
Linear |
Rotary |
분해능
(Resolution) |
±12.5
~200nm |
18
~22 bit |
정확도
(Accuracy) |
± 2µm |
± 0.005° |
인터페이스
(Interface) |
BiSS-C, SSI, SPI, ABZ |
|
|
Optira™ Series
|
Linear |
Rotary |
분해능
(Resolution) |
5µm
~5nm |
2k
~75MCPR |
정확도
(Accuracy) |
±1µm/m |
±2" |
인터페이스
(Interface) |
A-quad-B digital /
1Vpp analog |
|
|
ChipEncoder™ Series
|
Linear |
Rotary |
분해능
(Resolution) |
10
~1µm |
3k
~327kCPR |
정확도
(Accuracy) |
±5µm/m |
±2" |
인터페이스
(Interface) |
A-quad-B digital
(with index) |
|
|
Mercury™ Series M1500P
|
Linear |
Rotary |
분해능
(Resolution) |
5
~0.5µm |
6.6k
~655kCPR |
정확도
(Accuracy) |
±1µm/m |
±2" |
인터페이스
(Interface) |
A-quad-B digital
(with index) |
|
|
Mercury™ Series M1200
|
Linear |
Rotary |
분해능
(Resolution) |
20µm
~78nm |
2500
~4.2MCPR |
정확도
(Accuracy) |
±1µm/m |
±2" |
인터페이스
(Interface) |
1Vpp analog
(with index) |
|