- 크기: 350 x 350mm (± 0.8mm)
- 두께: 3mm (± 0.1mm)
- 평탄도: 10um (± 3µm)
- dot 간격: 10mm
- dot 영역: 320 x 320
- Accuracy: = 0.8 + (L in MM * 0.005)µm ≈ 2.4 × 2.4µm |
- 크기: 180 × 180mm (± 0.8mm)
- 두께: 3mm (± 0.1mm)
- 평탄도: 10µm (± 3µm)
- dot 간격: 25mm
- dot 영역: 150 × 150
- Accuracy: = 0.8 + (L in MM * 0.005)µm ≈ 1.55 × 1.55µm |
- 크기: 355 × 431mm (± 0.8mm)
- 두께: 3mm (± 0.1mm)
- 평탄도: 40µm (± 3µm)
- dot 간격: 25mm
- dot 영역: 325 × 400
- Accuracy: = 0.8 + (L in MM * 0.005)µm ≈ 2.4 × 2.8µm |
- 크기: 508 × 609mm(± 0.8mm)
- 두께: 4.8mm (± 0.1mm)
- 평탄도: 40µm (± 3µm)
- dot 간격: 25mm
- dot 영역: 475 × 575
- Accuracy: = 0.8 + (L in MM * 0.005)µm ≈ 3.2 × 3.7µm |