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Our MI-Series miniature interferometers equipped with triplefaceted
retroreflectors are precision length measurement
instruments designed for incorporation into customer supplied
systems, and are readily adapted to suit a wide variety of
experimental setups and tasks. The miniaturized sensor head
and triple-faceted retroreflector allow for their employment as
permanently installed metrological systems. The fiberoptic
coupled sensor head provides major benefits in many types of
applications and makes the overall metrological systems more
versatile. The miniature interferometer converts motions of the
triple-faceted retroreflector into optical interference signals that
are transmitted to the opto-electronic signal processing/power
supply unit for processing and output as lengths. A HeNe laser
serves as the light source for the miniature interferometer and
is frequency stabilized on models with large dynamic ranges.
Compensation of environmental influences form the basis for
high metric precisions and are achieved through the correction
of laser wavelengths.
The instruments themselves are free of linearity errors.
Instrument operation and display of measurement results are
controlled either through a separate keypad/display unit or a
PC running the software package supplied
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• Ultraprecise length measurement instruments
• Versatile instruments for incorporation into
customer supplied systems, readily adaptable
to suit a wide variety of tasks, easy to align
• Allows high retroreflector translation rates
• Insensitive to retroreflector angular
misalignments
• Fiberoptic coupled sensor head
• Causes no thermal interference
• Employs signal-acquisition/transmission hardware
immune to electromagnetic interference
• Employs a HeNe Laser with high frequency
stability as a length standard
• Corrects for variations in laser wavelength
caused by ambient conditions
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• Precision laser interferometric length measurement
instruments for incorporation into single/
multi-axis translation stages, microscope stages,
machine tools, or positioning systems
• Positioning single/ multi-axis machine beds
• Calibrating machine tools or coordinatemeasurement
machines
• Angular measurements
• Handling precision length measurement
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