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시작>SIOS Laser>3빔형(SP-TR)

 

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Triple-Beam

Plane-Mirror Interferometer

SP-TR Series

Design and Operation

 

Major Performance Features

Our triple-beam interferometers combine three interferometers

into a single unit and thus are capable of making simultaneous,

nanometer-precision, triaxial length measurements. They are

intended for incorporation into customer supplied systems.

Angles may be determined with high precisions from the differences

between pairs of length measurements and the respective

beam separations involved. The dynamic ranges for pitch and

yaw measurements are approximately two minutes of arc.

A HeNe laser emitting an ultrastable wavelength supplies all

three interferometers so that all three length measurements will

be based on the same reference length. A single fiberoptic

lightguide conducts its output beam to the interferometric sensor

head. Motions of the moving mirrors are converted into modulated

signals that are transmitted to an electronic power supply/

signal processing unit.

A HeNe laser serves as the light source for the miniature interferometer

and is frequency stabilized on models with large

dynamic ranges. Compensation of environmental influences form

the basis for high metric precisions and are achieved through the

correction of laser wavelengths. A PC running a custom software

package is employed for operating the electronic modules and

displaying measurement results.

 

• Simultaneous, ultraprecise,

triaxial length measurements as well as pitch

and yaw angle measurements

• A single laser supplies the beams for all three

measuring arms

• Factory made calibration of beam separations

 

Operating Principle

 

 

Applications

 

Laser-interferometric measurements on guides

and translation, microscope, and positioning

stages

High precision pitch and yaw corrections during

biaxial or multiaxial length measurements

Calibrating metrological equipment and machine

tools

Differential measurements (dilatometry,

materials testing)

Angular measurements over extended ranges

(> ± 2 arcmin; available on special order)

 

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