Our triple-beam interferometers combine three interferometers
into a single unit and thus are capable of making simultaneous,
nanometer-precision, triaxial length measurements. They are
intended for incorporation into customer supplied systems.
Angles may be determined with high precisions from the differences
between pairs of length measurements and the respective
beam separations involved. The dynamic ranges for pitch and
yaw measurements are approximately two minutes of arc.
A HeNe laser emitting an ultrastable wavelength supplies all
three interferometers so that all three length measurements will
be based on the same reference length. A single fiberoptic
lightguide conducts its output beam to the interferometric sensor
head. Motions of the moving mirrors are converted into modulated
signals that are transmitted to an electronic power supply/
signal processing unit.
A HeNe laser serves as the light source for the miniature interferometer
and is frequency stabilized on models with large
dynamic ranges. Compensation of environmental influences form
the basis for high metric precisions and are achieved through the
correction of laser wavelengths. A PC running a custom software
package is employed for operating the electronic modules and
displaying measurement results.
• Simultaneous, ultraprecise,
triaxial length measurements as well as pitch
and yaw angle measurements
• A single laser supplies the beams for all three
• Factory made calibration of beam separations