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Nano Vibration Analyzer

NA-Series

Design and Operation

Major Performance Features

The Nano Vibration Analyzer is a fiber-coupled laserinterferometric

vibrometer integrated in a precision technical

microscope. It is excellently suitable for measurements of

dynamic properties and static displacements of micro structures,

MEMS and cantilevers.

The flexible sample positioning in a wide range of 50 mm x 50

mm is achieved by the specific microscope set-up. The vibrating

object can be watched on PC by means of a USB camera.

Different objectives with magnifications of 10x and 50x are

changeable. DC deflection measurements as well as spectral

analysis up to a frequency of 2 MHz are possible. Amplitudes

can be measured with sub-nanometer resolution.

Operation and display of results employs a PC running specialized

data analysis software. This software allows the

frequency analysis of vibrations, the triggered data acquisition

and a script-controlled scanning of surface structures.

• High precision, noncontact vibration measurements

on micro objects

• Flexible sample positioning

• Different changeable objectives (10 x, 50 x)

• USB camera for observation of measuring objects

• Fiberoptic coupling of the laser beam

(eliminates thermal influences on measurement

results)

• Application-specific configuration

• Includes FFT spectrum-analysis software

Software für Windows - INFAS Vibro

• 3D display of planar vibrations

• Script-controlled measurement procedure

• Integrability into customized systems by TCP/IP

• Calculation of velocity and acceleration of

vibrational motion

• Spectrum analysis

• Averaging of spectra

Applications

• Noncontacting vibration measurements on micro

objects, MEMS und cantilevers

• Determining the vibrational spectrum

• Determining the vibrational shapes

(planar vibrations)

• Determining the resonant frequencies