Our Series SP-D double plane mirror interferometers are designed
for incorporation into customer supplied systems, and
are used for simultaneously making pairs of nanoprecision
length measurements. The differences in these pairs of length
measurements and the separations between their two beams
are then used for accurately determining the associated angles
involved, where the angular measurement range is approximately
two minutes of arc and independent of beam separation.
In cases involving small length changes, focusing their external
beams on the objects being measured increases the angular
measurement range up to ± 30 minutes of arc.
Laser light sources are coupled to the sensor heads via fiberoptic
cables. The miniature interferometers convert motions of
moving mirrors into pairs of optical interference signals that are
transmitted to electronic power supply/signal processing
modules for processing. HeNe lasers serve as light sources for
the interferometer and are frequency stabilized on models with
large dynamic ranges. Compensation of environmental influences
form the basis for high metric precisions and are achieved
through the correction of laser wavelengths. A PC running a
custom software package is employed for operating the electronic
modules and displaying measurement results.
• Makes ultraprecise simultaneous length and
• Employs highly frequency stabilized HeNe lasers
as light sources.
• Fiberoptic coupled sensor heads
• The beam separations may be tailored to suit
customers¡¯ special requirements.
• Compensates for shifts in laser wavelength due
to environmental influences.