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Miniature Double

Plane Mirror Interferometer

SP-D Series

Design and Operation

Major Performance Features

Our Series SP-D double plane mirror interferometers are designed

for incorporation into customer supplied systems, and

are used for simultaneously making pairs of nanoprecision

length measurements. The differences in these pairs of length

measurements and the separations between their two beams

are then used for accurately determining the associated angles

involved, where the angular measurement range is approximately

two minutes of arc and independent of beam separation.

In cases involving small length changes, focusing their external

beams on the objects being measured increases the angular

measurement range up to ± 30 minutes of arc.

Laser light sources are coupled to the sensor heads via fiberoptic

cables. The miniature interferometers convert motions of

moving mirrors into pairs of optical interference signals that are

transmitted to electronic power supply/signal processing

modules for processing. HeNe lasers serve as light sources for

the interferometer and are frequency stabilized on models with

large dynamic ranges. Compensation of environmental influences

form the basis for high metric precisions and are achieved

through the correction of laser wavelengths. A PC running a

custom software package is employed for operating the electronic

modules and displaying measurement results.

• Makes ultraprecise simultaneous length and

angular measurements.

• Employs highly frequency stabilized HeNe lasers

as light sources.

• Fiberoptic coupled sensor heads

• The beam separations may be tailored to suit

customers¡¯ special requirements.

• Compensates for shifts in laser wavelength due

to environmental influences.

Operating Principle

Applications

• Making measurements on plane tables, microscope

stages, positioning systems, coordinatemeasuring

machines, or machine tools.

• Correcting angular errors on dual-axis and

multi-axis coordinate measuring machines.

• Measuring linear displacements relative to reference

points

• Deformation studies

• Noncontact surface profiling

• Materials testing, e.g., dilatometry