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Nanopositioning and

Nanomeasuring Machine

NMM-1

Design and Operation

Major Performance Features

The Nanopositioning and Nanomeasuring Machine is used for

three-dimensional coordinate measurement in a range of

25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. Its unique

sensor arrangement provides Abbe error-free measurements on

all three coordinate axes. The measurement axes of three miniature

plane mirror interferometers for length measurements intersect

with the contacting point of the probe sensor at the object

being measured at a single point.

The object to be measured is placed directly on a movable mirror

corner. The position of this mirror corner is monitored by the three

fixed miniature interferometers. The mirror corner is positioned by

a three axis driving system. Any angular deviations that may

occur during the positioning process are measured and corrected

by two angle sensors.

The light of three stabilized lasers are guided from the electronics

unit to the interferometer heads by fiberoptic lightguides, providing

a compact, thermally stable set-up of the Nanopositioning and

Nanomeasuring Machine. The heart of its electronics unit is a

digital signal processor (DSP) that processes all incoming signals,

controls its drive system and governs the course of measurement

procedures

• Three dimensional coordinate positioning and

measuring system of the highest accuracy

• Abbe Comparator principle employed in each

of the three measuring axes

• Modes of operation:

1. as a dynamic positioning system

2. as a measuring system operating in either

continuous-scan mode or single-step mode

• Control of NMM-1 employs an easy to use script

language running on the host PC equipped with

a USB-interface

• An optional contact system acts as zeroindicator

and is interchangeable.

• The probe sensors can be attached according

to customer requirements, e.g. laser focus

sensors LFS-series, scanning tunnelling and

scanning atomic force microscopes,

capacitive or inductive sensing systems.

Technical Data

Basic set-up according to the comparator principle of Abbe

Technical Data

Measuring and

positioning range: 25 mm x 25 mm x 5 mm

Resolution: 0.1 nm

Driving speed, except in measurement mode:

• X,Y axis ¡Â 2 mm/s

• Z axis ¡Â 50 mm/s

Measuring speed depends on probe system and

application

Probe sensors: external analog interface

for customized probe

sensor system is provided

(input-voltage max. ± 10 V,

resolution 16 Bit)

Length of the cable between measuring table

and electronics unit: approx. 4 m

Dimensions (H x W x D):

• NMM-1: (340 x 420 x 420) mm

• Electronics unit: (700 x 553 x 600) mm

Weight:

• NMM-1: 95 kg

• Electronics unit: 75 kg

Measurement table of NMM-1 showing its measurement axes

Applications

• Positioning, manipulation, processing and

measurement of objects in the fields of micromechanics,

microelectronics, optics, molecular

biology and microsystems engineering with

nanometric precision within a large range

• Measurement of precision parts, such as the

tips of hardness testing probes, membranes

and micro lenses

• Calibration of step height standards and pitch

standards